Functional layout


Overall effect chart

1、Products overview
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.

1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.

1.2Basic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.

The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision. 

2、Technical parameters

設備名稱 Device name	PECVD石墨舟裝卸片機 PECVD graphite boat loading and unloading machine technique
型號規格 Specifications	PE-3800
適用石墨舟 Apply the graphite boat	CT-21-240改造 CT-21-240transform
工位數量 Location number	兩個石墨舟工位分別為A石墨舟工位B石墨舟工位 Two graphite boat station is A graphite boat station B graphite boat station respectively
換盒傳送 In box transfer	伺服定位，自動換盒，更換片盒時設備不停機， Servo positioning, automatic switch box, replacing disc devices do not stop，
硅片上、下料方式 Silicon wafers, blanking mode	上料方式：50/62/100片花籃上料；下料方式：堆疊收集 Feeding way: 50/62/100 slice of flower basket; Blanking: stacked collection
產能 Capacity	3800片/小時（備注：21片石墨舟）以此為準 3800 pieces per hour (note: 21 pieces of graphite boat) to shall prevail
壓縮空氣 Compressed air	壓力：≥0.6Mpa pressure：≥0.6Mpa
運行時間 Uptime	>98%
電源 Power	AC380V（單相三線制）/50Hz AC380V（Single-phase three-wire system）/50Hz
整機功率 Engine power	6KW
執行系統 Perform system	史陶比爾TX90L智能機器人 Staubli TX90L intelligent robot